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How to choose the appropriate configuration of the probe station and how to determine the accuracy?

The following issues usually need to be identified to determine the probe station selection:

1. How many inches of wafers or devices need to be measured? Zh
2. How high is the mechanical accuracy of the probe station? Zh
3. What is the size of the spot sample? A 100um * 100um or 60um * 60um pad, or a mini pad made by FIB, or the metal inside the IC? Zh
4. The stereo microscope can be used for pads larger than 20um (the maximum magnification of stereo microscope is 200 times)
5. How many probes are needed for spot measurement at the same time? Zh
6. What is the maximum current and voltage that will be tested (the higher the voltage, the thicker the tip of the probe, the higher the requirements on the fixture. The coaxial fixture is recommended below 5A, and the three axis is recommended above 5A Fixture)
7. How high does the leakage accuracy need to be? Is there a need for RF? Triaxial tubular clamp: 100FA, coaxial spring clamp: 10PA (leakage accuracy: the smallest measurable current magnitude)
8. Will probe cards be used? Zh
9. What is the minimum resolution required for an optical microscope? Zh
10. In terms of microscope, do I need to add polarizers for LC hotspot detection? Zh
11. What are the connected test instrument interfaces? Zh
12. Do I need to heat or cool down when testing the environment? Zh
13. What are the leakage requirements for chuck? Do I need to add a low impedance chuck? Zh
14. Do you need a shockproof table? Zh
15. Is there any compressed air if I add a shockproof table?